Loadlock/Transfer > Vacuum Suitcase: NIST
NIST Omicron Multi-level Vacuum Suitcase
This portable vacuum system located at NIST is intended for in-vacuum sample transportation between multiple measurement and fabrication stations. The suitcase is a complete autonomous system mounted on a mobile cart with vertical adjustability for multiple sample transfer heights. It includes a storage chamber, buffer (interstitial) chamber, sample transporter, valves, pumps and gauges with the respective controllers and power supplies.
The system has a UPS (uninterruptible power supply) to maintain power for the ion pump and gauges for periods longer than an hour. The linear/rotary magnetic manipulator has a pincher grip for the handling of Omicron style sample holders, but pincher grips or lift devices could be fabricated for any number of different types of transfers.