Loadlocks and Transfers > Single Substrate Systems: Mascot
Applications include process development, as a manufacturing tool or for low-volume production.
MASCOT Loadlock and Transfer Systems
This high-vacuum compatible, single-substrate loadlock system is designed to manually load wafers or other flat substrates into a SEMI-standard or custom process chamber. The MASCOT can mimic the motions of a complex and costly robot but is convenient to use and significantly less costly.
Typically the MASCOT Loadlock would be mounted to a gate valve attached to a main system chamber. A substrate can then be easily positioned through the large entry door onto the transfer stage in the loadlock chamber. After the loadlock is evacuated to the desired vacuum level, and the gate valve opened, the substrate is transferred into the process chamber by gliding the magnet carriage along the outer tube. This allows repeated substrate loading and unloading without breaking vacuum in the main chamber greatly reducing process time.
Chambers are available for wafers or substrates up to 200mm, 300mm or 450mm. Optional items include vertical lift capability, heavy-duty cart for portability and limit switches. Chambers can be modified or customized for non-standard applications.
A Precision Magnetic Manipulator (PMM) is used as the transfer device on the MASCOT Loadlock system. See PMM descrip-tion for complete specifications on these manipulators. A MASCOT-LO, with a linear-only PMM will precisely transfer a substrate into a process chamber where the receiving station has vertical lift capability to remove the substrate from a carrier on the end of the PMM. The MASCOT-LR uses a linear-rotary PMM where the rotation is actually used to operate a dynamic end effector with vertical motion capability to lift or lower a substrate during transfer. The PMM with a dynamic end effector can deliver a substrate to the process chamber and lower to set the substrate onto the receiving stage for processing. The PMM returns to lift the substrate and withdraw it into the loadlock chamber for removal after processing is complete.
SPECIFICATIONS AND DESCRIPTION
|MODEL||MASCOT 200||MASCOT 300||MASCOT 450|
|Chamber||Single machined aluminum block, HV compatible, Metal with Viton O-rings||Single machined aluminum block, HV compatible, Metal with Viton O-rings||Single machined aluminum block, HV compatible, Metal with Viton O-rings|
|Transfer System||All HV Compatible||All HV Compatible||All HV Compatible|
|Substrate sizes||Up to 200mm||Up to 300mm||Up to 450mm|
|Exterior dimension||14" x 11.5" x 4"||18.70" x 14.75" x 4"||24.50" x 22.50" x 8"|
|Load door w/window||10" load door||14" load door||19" load door|
|MESC-standard interface||SEMI E21-91||SEMI E21||Not specified|
|Chamber volume with typical PMM installed||3.89 Liters||7.51 Liters||17.32 Liters|
|Pump port||ISO NW100 (4" ID)||ISO NW100||ISO NW100|
|Auxiliary ports||Three ISO NW40||Three ISO NW40||ISO NW40||Weight||~ 45 pounds (with PMM)||~ 60 pounds (with PMM)||~ 90 pounds (with PMM)|
|Transfer distance||Up to 60 inches||Up to 60 inches||Up to 60 inches|
|Dynamic End Effector vertical travel||Standard = 0.276" total||Standard = 0.5" total||Standard = 1.0" total|
|Specifications subject to change without notice.|
DIAGRAM OF TYPICAL 200mm MASCOT LOADLOCK SYSTEM
DIAGRAM OF TYPICAL 300mm MASCOT LOADLOCK SYSTEM
DIAGRAM OF TYPICAL 450mm MASCOT LOADLOCK SYSTEM
CUSTOM MASCOT SYSTEMS
Customized MASCOT chambers can accommodate substrates in a wide range of shapes and sizes. The MASCOT valve interface can be modified to mate to a variety of vacuum systems.
Dual MASCOT System shown can introduce a sample to two different chambers without bringing the sample back to atmosphere.