Loadlocks and Transfers > Single Substrate Systems: TEAM-Mate
TEAM-Mate Loadlock and Transfer Systems
This compact, high-vacuum compatible, single-substrate loadlock system is designed to load wafers or other flat substrates into a SEMI-standard or custom process chamber. This small footprint system can mimic the motions of a robot at significantly less cost.
Typically the TEAM-Mate Loadlock would be mounted to a gate valve attached to a main system chamber. A substrate can then be easily positioned through the large entry door onto the transfer stage in the loadlock chamber. The loadlock would then be evacuated to the desired vacuum level, the gate valve opened and the substrate transferred into the process chamber. This allows repeated substrate loading and unloading without breaking vacuum in the main chamber greatly reducing process time.
Chambers are available for wafers or substrates up to 200mm, 300mm or 450mm. Optional items include custom chambers, vertical lift capability, heavy-duty cart for portability and limit switches. Motion can be operated manually or motorized. Applications include process development, as a manufacturing tool or for low-volume production.
SPECIFICATIONS AND DESCRIPTION
| MODEL | TEAM-Mate 200 | TEAM-Mate 300 | TEAM-Mate 450 |
|---|---|---|---|
| Material | |||
| Chamber | Single machined aluminum block, HV compatible, Metal with Viton O-rings | Single machined aluminum block, HV compatible, Metal with Viton O-rings | Single machined aluminum block, HV compatible, Metal with Viton O-rings |
| Transfer System | All HV Compatible | All HV Compatible | All HV Compatible |
| Description | |||
| Substrate sizes | Up to 200mm | Up to 300mm | Up to 450mm |
| Exterior dimension | 23.64" x 13.38" x 7.59" | 32" x 17.31" x 6.41" | 44.51" x 25.4" x 10.4" * |
| Chamber volume | 4.0 Liters | 6.5 Liters | 23 Liters |
| Pump port | ISO NW40 | ISO NW63 | ISO NW100 |
| Auxiliary ports | Two ISO NW16 | Three ISO NW40 | Up to three ISO NW40 | Weight | ~ 49 pounds | ~ 60 pounds | ~ 120 pounds ** |
| Performance | |||
| Transfer distance | Up to 12 inches from front flange - User programmable | Up to 18.3 inches from front flange - User programmable | Up to 22 inches from front flange - User programmable |
| Positioning accuracy | ±0.002 inches | ±0.002 inches | ±0.002 inches |
| Motorization Controls | |||
| System I/O | Pushbutton, RS232 or digital I/O | Pushbutton, RS232 or digital I/O | Pushbutton, RS232 or digital I/O |
| Pushbuttons | Set Point/Extract/Retract | Set Point/Extract/Retract | Set Point/Extract/Retract *** |
| Manual Controls | |||
| Manual Operation | Hand crank | Hand crank | Hand crank |
| Vertical lift/lower | Lever | Lever | Lever |
|
* Z Lift Option adds approximately 2" to height ** Z Lift Option increases weight dependent on model *** Z Lift Option adds Get & Put capability TEAM-MateTM Loadlock Patent Pending Specifications subject to change without notice. |
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DIAGRAM OF TYPICAL 200mm TEAM-MATE LOADLOCK SYSTEM
DIAGRAM OF TYPICAL 300mm TEAM-MATE LOADLOCK SYSTEM
DIAGRAM OF TYPICAL 450mm TEAM-MATE LOADLOCK SYSTEM
CUSTOM MASCOT SYSTEMS
Customized TEAM-Mate chambers can accommodate substrates in a wide range of shapes and sizes. The TEAM-Mate valve interface can be modified to mate to a variety of vacuum systems.