Loadlock/Transfer > Single Substrate Systems: NW/ISO-Based
NW/ISO-Based Loadlock and Transfer Systems
A high-vacuum compatible loadlock system is an efficient, cost-effective method of loading substrates into a vacuum chamber without breaking vacuum. Loading the substrate into an introduction-chamber (loadlock) and evacuating the loadlock prior to transferring the substrate into the main chamber saves a significant amount of time in reaching the required operating pressure. Without repeated venting to atmospheric pressure, the main chamber remains cleaner and dryer. There are many unique magnetically-coupled transfer devices available for sample introduction.
Loadlock chambers can be constructed to a user-specified size with choices of materials, mounting flanges, pump and auxiliary ports, windows or blank-offs and transporters. Mounting flanges can be standard CFF, NW/ISO or custom. Shown below are examples of a few of the loadlocks provided using various sized NW/ISO mounting flanges. Each system can be ordered as shown or reconfigured to meet your specific requirements.
NW 40 MOUNTING FLANGE
SPECIFICATIONS AND DESCRIPTION
| Chamber body | 6061 aluminum, custom 4-way cross |
| Sample loading | Through door of attached loadlock |
| Mounting flange | NW 40 |
| Accessory ports | Two NW 40 – One with glass viewport |
| Pump port | Pump-down through attached loadlock |
| Typical sample | 1 inch PHI puck |
| Magnetic transporter | Compact-LO linear-only shown in example. Several models could be used. |
| Vacuum level | < 5x10-8 Torr with appropriate pumping |
| Initial application | Portable vacuum suitcase for introduction of aluminum “cup” holding PHI one-inch puck between PHI 5600 systems |
| Upgrades available | Custom systems available to transfer samples between different systems |
| Specifications subject to change without notice. | |
ISO 63 MOUNTING FLANGE
SPECIFICATIONS AND DESCRIPTION
| Chamber body | 66061 aluminum, electropolish finish |
| Sample loading | Quick access, top door with viewport Door sealed with Viton o-ring |
| Mounting flange | ISO 63 |
| Accessory ports | Two ISO 63 |
| Pump port | ISO 63 |
| Max single sample size | 2.3” wide x 1” high x 6” long |
| Magnetic transporter | Model MASLR shown in example. Several models could be used. |
| Vacuum level | < 5x10-8 Torr with appropriate pumping |
| Initial application | Introduction of small sample holder to cryogenic probing system |
| Upgrades available | |
| Specifications subject to change without notice. | |
ISO 100 MOUNTING FLANGE
SPECIFICATIONS AND DESCRIPTION
| Chamber body | Welded stainless steel electropolish finish |
| Sample loading | Quick access, top door, door sealed with Viton o-ring |
| Mounting flange | ISO 100 |
| Accessory ports | Two NW 16 |
| Pump port | ISO 63 |
| Max single sample size | 3” wide x 1” high x 3” long |
| Magnetic transporter | Model DBLRP shown in example. Several models could be used. |
| Vacuum level | < 5x10-8 Torr with appropriate pumping |
| Initial application | Introduction of small sample holder to cryogenic probing system |
| Upgrades available | |
| Specifications subject to change without notice. | |
ISO 160 MOUNTING FLANGE
SPECIFICATIONS AND DESCRIPTION
| Chamber body | 6061 aluminum, electropolish finish |
| Sample loading | Quick access, top door, door sealed with Viton o-ring |
| Mounting flange | ISO 160 |
| Accessory ports | Two NW 25 |
| Pump port | ISO 63 |
| Max single sample size | 4” wide x 1” high x 4” long |
| Magnetic transporter | Model DBLRP, linear-rotary shown in example with Model CSS, Carriage Stop Switch and Model ALDEF, Dynamic End Effector for lift. Several models could be used. |
| Vacuum level | < 5x10-8 Torr with appropriate pumping |
| Initial application | Introduction of small sample holder to 4x4” substrate carrier |
| Loadlock Heating | Two 150 watt quartz halogen bulbs/TC/ ceramic insulators with heater controller |
| Upgrades available | Unit could be motorized. Add pump package |
| Specifications subject to change without notice. | |
ISO 200 MOUNTING FLANGE
SPECIFICATIONS AND DESCRIPTION
| Chamber body | Welded stainless steel electropolish finish |
| Sample loading | Sample loads through attached loadlock and retracted through gate valve into chamber |
| Mounting flange | ISO 200 |
| Accessory ports | Two NW 40 |
| Pump port | NW 40 |
| Max single sample size | 5.5” wide x 1” high x 5.5” long |
| Magnetic transporter | Model DBLRP linear-rotary shown with Model KLMDA Motor Drive. Mounted on top with NW200-2 ¾ CFF Adapter. Various models could be used. |
| Vacuum level | < 5x10-8 Torr with appropriate pumping |
| Initial application | Vacuum suitcase on steel frame allowing portability of sample under vacuum from one processing system to another. |
| Upgrades available | Custom systems available |
| Specifications subject to change without notice. | |