Loadlock/Transfer > Single Substrate Systems: CFF-Based
CFF-Based Loadlock and Transfer Systems
A high-vacuum compatible loadlock system is an efficient, cost-effective method of loading substrates into a vacuum chamber without breaking vacuum. Loading the substrate into an introduction-chamber (loadlock) and evacuating the loadlock prior to transferring the substrate into the main chamber saves a significant amount of time in reaching the required operating pressure. Without repeated venting to atmospheric pressure, the main chamber remains cleaner and dryer. There are many unique magnetically-coupled transfer devices available for sample introduction.
Loadlock chambers can be constructed to a user-specified size with choices of materials, mounting flanges, pump and auxiliary ports, windows or blank-offs and transporters. Mounting flanges can be standard CFF, ISO or custom. Shown below are examples of a few of the loadlocks provided using various sized CFF mounting flanges. Each system can be ordered as shown or reconfigured to meet your specific requirements.
2.75" CFF MOUNTING FLANGE
SPECIFICATIONS AND DESCRIPTION
| Chamber body | Welded stainless steel electropolish finish |
| Sample loading | Quick access door with latches, door sealed with Viton o-ring |
| Mounting flange | 2.75" CFF |
| Accessory ports | None required |
| Pump port | 2.75" CFF |
| Sample size | Sample holder 7" x 1" x 1" |
| Magnetic transporter | MASLR, PMM-Lite with KLMDA, Motor Drive for motorization |
| Vacuum level | < 5x10-8 Torr with appropriate pumping |
| Initial application | Installed vertically. Holds resist coated wafer pieces (strips) for exposure to EUV radiation and measurement of the outgassing from the resist |
| Specifications subject to change without notice. | |
4.5" CFF MOUNTING FLANGE
SPECIFICATIONS AND DESCRIPTION
| Chamber body | Welded stainless steel electropolish finish |
| Sample loading | Quick access, top door, door sealed with Viton o-ring |
| Mounting flange | 4.5" CFF |
| Accessory ports | 2.75 CFF |
| Pump port | 2.75" CFF |
| Sample size | Holder for 1" x .25" x 1/8" thick |
| Magnetic transporter | Model DBLRP |
| Vacuum level | < 5x10-8 Torr with appropriate pumping |
| Initial application | Introduce samples to perform in-situ spectroscopic ellipsometry of metal films during hydrogen loading and oxidation. |
| Specifications subject to change without notice. | |
6" CFF MOUNTING FLANGE
SPECIFICATIONS AND DESCRIPTION
| Chamber body | Welded stainless steel electropolish finish |
| Sample loading | Quick access, top door, door sealed with Viton o-ring |
| Mounting flange | 6" CFF |
| Accessory ports | Two NW25 |
| Pump port | NW40 |
| Sample size | 3" x 3" |
| Magnetic transporter | Model DBLRM with ALDEF, Dynamic End Effector for vertical lift |
| Vacuum level | < 1x10-8 Torr with appropriate pumping |
| Initial application | Deliver 3" x 3" glass substrates into a process module |
| Specifications subject to change without notice. | |
8" CFF MOUNTING FLANGE
SPECIFICATIONS AND DESCRIPTION
| Chamber body | Welded stainless steel electropolish finish |
| Sample loading | Quick access, top door, door sealed with Viton o-ring |
| Mounting flange | 8" CFF |
| Accessory ports | 2.75 CFF |
| Pump port | 4.5 CFF |
| Sample size | 3" sample |
| Magnetic transporter | Model DBLRP with low profile Model VMTEX-2, Transferable Experimental Station for heating capability |
| Vacuum level | < 5x10-8 Torr with appropriate pumping |
| Initial application | Materials research at a university |
| Specifications subject to change without notice. | |
10" CFF MOUNTING FLANGE
SPECIFICATIONS AND DESCRIPTION
| Chamber body | Welded stainless steel electropolish finish |
| Sample loading | Quick access door with halogen lamp outgass assembly, door sealed with Viton o-ring |
| Mounting flange | 10" CFF |
| Accessory ports | (2) 2.75" CFF, (2) 1.33 CFF |
| Pump port | 4.5 CFF |
| Sample size | 4.75" or less |
| Magnetic transporter | Model DBLRP with ALDEF, Dynamic End Effector for vertical lift |
| Vacuum level | < 5x10-8 Torr with appropriate pumping |
| Initial application | Halogen lamps degass loadlock for delivery of substrates to deposition system |
| Specifications subject to change without notice. | |
12" CFF MOUNTING FLANGE
SPECIFICATIONS AND DESCRIPTION
| Chamber body | Welded stainless steel electropolish finish |
| Sample loading | Quick access, top door with window, door sealed with Viton o-ring |
| Mounting flange | 12" CFF |
| Accessory ports | (2) 2.75 tapered, (1) 2.75" CFF |
| Pump port | 4.5 CFF |
| Sample size | 8" wafer |
| Magnetic transporter | Model DBLRP with HD FBA, Model ALDEF-5, Dynamic End Effector for vertical lift and CSS-LR Switching Carriage Stop |
| Vacuum level | < 5x10-8 Torr with appropriate pumping |
| Initial application | Delivered to an OEM to be added to a MoCVD system for wafer introduction. |
| Specifications subject to change without notice. | |